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SEM,TEM,XPS,FIB....Ź»óÇü Áø°ø ÇöóÁ Ŭ¸®³Ê & ¿¡ÃÄ
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Ãʺ¸ÀÚµµ »ç¿ëÀÌ ¿ëÀÌÇÑ ÀüÀÚµ¿ ƯÇã Á¦Ç°
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13.56MHz, 0-75W, 0-150W, 0-300W, 0-500W
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è¹ö»çÀÌÁî: 4, 6, 8 (ÀÎÄ¡)
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PIE Scientific (USA)
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¸ðµ¨ : Tergeo, Tergeo Plus, Tergeo-EM
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¹ÝµµÃ¼Àåºñ, SEM, FIB, XPS, SIMS, AES.....
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¿ø°Ý Áø°ø ÇöóÁ
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13.56MHz, 0-75W, 0-150W
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in-situ plasma cleaners
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PIE Scientific (USA)
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¸ðµ¨ : EM-Kleen, Semi-Kleen, SEMI-Kleen UHV
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µ¿±Þ ¼¼°è ÃÖ¼ÒÇü ÇÚµðÇü »ó¾Ð Àú¿Â ÇöóÁ
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R&D, ´ÙǰÁ¾ ¼Ò·® »ý»ê¿ë Á¦Ç° : ¼¿ï´ë, °æÈñ´ë, ¼øÃµ´ë,
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»ï¼ºÀü±â, ÀüÀÚÅë½Å¿¬±¸¿ø, ¿¡³ÊÁö±â¼ú¿¬±¸¿ø...»ç¿ëÇϽʴϴÙ.
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PDD(Piezoelectric Direct Discharge) technology
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Relyon Plasma (Germnay)
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¸ðµ¨ : PZ3, PZ3-i...
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